Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
Збережено в:
| Дата: | 2012 |
|---|---|
| Автори: | , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2012
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| Назва видання: | Ukrainian Journal of Physics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000724890 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-93350 |
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| spelling |
open-sciencenbuvgovua-933502024-04-17T16:57:41Z Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material Yu. V. Kovtun Ye. I. Skibenko A. I. Skybenko V. B. Yuferov 0372-400X 2012 en Ukrainian Journal of Physics http://jnas.nbuv.gov.ua/article/UJRN-0000724890 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Ukrainian Journal of Physics |
| spellingShingle |
Ukrainian Journal of Physics Yu. V. Kovtun Ye. I. Skibenko A. I. Skybenko V. B. Yuferov Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| format |
Article |
| author |
Yu. V. Kovtun Ye. I. Skibenko A. I. Skybenko V. B. Yuferov |
| author_facet |
Yu. V. Kovtun Ye. I. Skibenko A. I. Skybenko V. B. Yuferov |
| author_sort |
Yu. V. Kovtun |
| title |
Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title_short |
Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title_full |
Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title_fullStr |
Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title_full_unstemmed |
Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| title_sort |
estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material |
| publishDate |
2012 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000724890 |
| work_keys_str_mv |
AT yuvkovtun estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial AT yeiskibenko estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial AT aiskybenko estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial AT vbyuferov estimationoftheefficiencyofmaterialinjectionintothereflexdischargebysputteringthecathodematerial |
| first_indexed |
2025-07-22T13:17:12Z |
| last_indexed |
2025-07-22T13:17:12Z |
| _version_ |
1850421222097027072 |