Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development

Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development

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Datum:2012
Hauptverfasser: V. E. Storizhko, V. I. Miroshnichenko, A. G. Ponomarev
Format: Artikel
Sprache:English
Veröffentlicht: 2012
Schriftenreihe:Science and innovation
Online Zugang:http://jnas.nbuv.gov.ua/article/UJRN-0000740630
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-935152024-04-17T16:59:12Z Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development V. E. Storizhko V. I. Miroshnichenko A. G. Ponomarev 1815-2066 2012 en Science and innovation http://jnas.nbuv.gov.ua/article/UJRN-0000740630 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Science and innovation
spellingShingle Science and innovation
V. E. Storizhko
V. I. Miroshnichenko
A. G. Ponomarev
Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development
format Article
author V. E. Storizhko
V. I. Miroshnichenko
A. G. Ponomarev
author_facet V. E. Storizhko
V. I. Miroshnichenko
A. G. Ponomarev
author_sort V. E. Storizhko
title Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development
title_short Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development
title_full Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development
title_fullStr Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development
title_full_unstemmed Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development
title_sort nanofabrication with using of proton beam writing: state of the art and prospects of development
publishDate 2012
url http://jnas.nbuv.gov.ua/article/UJRN-0000740630
work_keys_str_mv AT vestorizhko nanofabricationwithusingofprotonbeamwritingstateoftheartandprospectsofdevelopment
AT vimiroshnichenko nanofabricationwithusingofprotonbeamwritingstateoftheartandprospectsofdevelopment
AT agponomarev nanofabricationwithusingofprotonbeamwritingstateoftheartandprospectsofdevelopment
first_indexed 2025-07-22T13:19:41Z
last_indexed 2025-07-22T13:19:41Z
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