Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development
Збережено в:
| Дата: | 2012 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2012
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| Назва видання: | Science and innovation |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000740630 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859545531772043264 |
|---|---|
| author | V. E. Storizhko V. I. Miroshnichenko A. G. Ponomarev |
| author_facet | V. E. Storizhko V. I. Miroshnichenko A. G. Ponomarev |
| author_sort | V. E. Storizhko |
| collection | Open-Science |
| first_indexed | 2025-07-22T13:19:41Z |
| format | Article |
| id | open-sciencenbuvgovua-93515 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T13:19:41Z |
| publishDate | 2012 |
| record_format | dspace |
| series | Science and innovation |
| spelling | open-sciencenbuvgovua-935152024-04-17T16:59:12Z Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development V. E. Storizhko V. I. Miroshnichenko A. G. Ponomarev 1815-2066 2012 en Science and innovation http://jnas.nbuv.gov.ua/article/UJRN-0000740630 Article |
| spellingShingle | Science and innovation V. E. Storizhko V. I. Miroshnichenko A. G. Ponomarev Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development |
| title | Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development |
| title_full | Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development |
| title_fullStr | Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development |
| title_full_unstemmed | Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development |
| title_short | Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development |
| title_sort | nanofabrication with using of proton beam writing: state of the art and prospects of development |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000740630 |
| work_keys_str_mv | AT vestorizhko nanofabricationwithusingofprotonbeamwritingstateoftheartandprospectsofdevelopment AT vimiroshnichenko nanofabricationwithusingofprotonbeamwritingstateoftheartandprospectsofdevelopment AT agponomarev nanofabricationwithusingofprotonbeamwritingstateoftheartandprospectsofdevelopment |