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Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
2012
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| Series: | Science and innovation |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000740630 |
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open-sciencenbuvgovua-935152024-04-17T16:59:12Z Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development V. E. Storizhko V. I. Miroshnichenko A. G. Ponomarev 1815-2066 2012 en Science and innovation http://jnas.nbuv.gov.ua/article/UJRN-0000740630 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Science and innovation |
| spellingShingle |
Science and innovation V. E. Storizhko V. I. Miroshnichenko A. G. Ponomarev Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development |
| format |
Article |
| author |
V. E. Storizhko V. I. Miroshnichenko A. G. Ponomarev |
| author_facet |
V. E. Storizhko V. I. Miroshnichenko A. G. Ponomarev |
| author_sort |
V. E. Storizhko |
| title |
Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development |
| title_short |
Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development |
| title_full |
Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development |
| title_fullStr |
Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development |
| title_full_unstemmed |
Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development |
| title_sort |
nanofabrication with using of proton beam writing: state of the art and prospects of development |
| publishDate |
2012 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000740630 |
| work_keys_str_mv |
AT vestorizhko nanofabricationwithusingofprotonbeamwritingstateoftheartandprospectsofdevelopment AT vimiroshnichenko nanofabricationwithusingofprotonbeamwritingstateoftheartandprospectsofdevelopment AT agponomarev nanofabricationwithusingofprotonbeamwritingstateoftheartandprospectsofdevelopment |
| first_indexed |
2024-04-18T05:13:57Z |
| last_indexed |
2024-04-18T05:13:57Z |
| _version_ |
1796887037586964480 |