Nanofabrication with Using of Proton Beam Writing: State of the Art and Prospects of Development
Saved in:
| Date: | 2012 |
|---|---|
| Main Authors: | V. E. Storizhko, V. I. Miroshnichenko, A. G. Ponomarev |
| Format: | Article |
| Language: | English |
| Published: |
2012
|
| Series: | Science and innovation |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000740630 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNASSimilar Items
-
Vector proton beam writing system
by: Polozhii, H.E., et al.
Published: (2022) -
Proton beam writing: world experience and prospectives in Ukraine
by: H. Y. Polozhii, et al.
Published: (2023) -
Using of proton beam writing techniques for fabrication of micro difraction gratings
by: Ponomarev, A.G., et al.
Published: (2018) -
Probe formation in proton beam writing facility at IAP NASU
by: Lapin, O.S., et al.
Published: (2015) -
Proton Beam Writing Device Based on Electrostatic Accelerator for 3D Micro- and Nano-Structure Fabrication
by: A. G. Ponomarev, et al.
Published: (2019)