Zaiats, M. S., Boiko, V. H., Romaniuk, B. M., & Lytvyn, P. M. (2021). Low-temperature ion-plasma deposition technology of nanostructured films of aluminum and boron nitrides.
Chicago Style (17th ed.) CitationZaiats, M. S., V. H. Boiko, B. M. Romaniuk, and P. M. Lytvyn. Low-temperature Ion-plasma Deposition Technology of Nanostructured Films of Aluminum and Boron Nitrides. 2021.
MLA (8th ed.) CitationZaiats, M. S., et al. Low-temperature Ion-plasma Deposition Technology of Nanostructured Films of Aluminum and Boron Nitrides. 2021.
Warning: These citations may not always be 100% accurate.