Pogrebnjak, A. D., Mukhammed, A. K., Ivashchenko, M. N., Opanasjuk, N. N., & Sudzhanskaja, I. V. (2012). Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods.
Chicago-Zitierstil (17. Ausg.)Pogrebnjak, A. D., A. K.M Mukhammed, M. N. Ivashchenko, N. N. Opanasjuk, und I. V. Sudzhanskaja. Structural Studies of Zinc Oxide and Aluminum Nitride Films Obtained by CVD and Magnetron Sputtering Methods. 2012.
MLA-Zitierstil (8. Ausg.)Pogrebnjak, A. D., et al. Structural Studies of Zinc Oxide and Aluminum Nitride Films Obtained by CVD and Magnetron Sputtering Methods. 2012.
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