Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods
Gespeichert in:
| Datum: | 2012 |
|---|---|
| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2012
|
| Schriftenreihe: | Physical surface engineering |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000906915 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-94133 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-941332024-04-17T17:04:21Z Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods A. D. Pogrebnjak A. K.M. Mukhammed M. N. Ivashchenko N. N. Opanasjuk I. V. Sudzhanskaja 1999-8074 2012 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000906915 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering A. D. Pogrebnjak A. K.M. Mukhammed M. N. Ivashchenko N. N. Opanasjuk I. V. Sudzhanskaja Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods |
| format |
Article |
| author |
A. D. Pogrebnjak A. K.M. Mukhammed M. N. Ivashchenko N. N. Opanasjuk I. V. Sudzhanskaja |
| author_facet |
A. D. Pogrebnjak A. K.M. Mukhammed M. N. Ivashchenko N. N. Opanasjuk I. V. Sudzhanskaja |
| author_sort |
A. D. Pogrebnjak |
| title |
Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods |
| title_short |
Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods |
| title_full |
Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods |
| title_fullStr |
Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods |
| title_full_unstemmed |
Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods |
| title_sort |
structural studies of zinc oxide and aluminum nitride films obtained by cvd and magnetron sputtering methods |
| publishDate |
2012 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000906915 |
| work_keys_str_mv |
AT adpogrebnjak structuralstudiesofzincoxideandaluminumnitridefilmsobtainedbycvdandmagnetronsputteringmethods AT akmmukhammed structuralstudiesofzincoxideandaluminumnitridefilmsobtainedbycvdandmagnetronsputteringmethods AT mnivashchenko structuralstudiesofzincoxideandaluminumnitridefilmsobtainedbycvdandmagnetronsputteringmethods AT nnopanasjuk structuralstudiesofzincoxideandaluminumnitridefilmsobtainedbycvdandmagnetronsputteringmethods AT ivsudzhanskaja structuralstudiesofzincoxideandaluminumnitridefilmsobtainedbycvdandmagnetronsputteringmethods |
| first_indexed |
2025-07-22T13:33:17Z |
| last_indexed |
2025-07-22T13:33:17Z |
| _version_ |
1850421312999129088 |