Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods
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| Дата: | 2012 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2012
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000906915 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-94133 |
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open-sciencenbuvgovua-941332024-04-17T17:04:21Z Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods A. D. Pogrebnjak A. K.M. Mukhammed M. N. Ivashchenko N. N. Opanasjuk I. V. Sudzhanskaja 1999-8074 2012 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000906915 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering A. D. Pogrebnjak A. K.M. Mukhammed M. N. Ivashchenko N. N. Opanasjuk I. V. Sudzhanskaja Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods |
| format |
Article |
| author |
A. D. Pogrebnjak A. K.M. Mukhammed M. N. Ivashchenko N. N. Opanasjuk I. V. Sudzhanskaja |
| author_facet |
A. D. Pogrebnjak A. K.M. Mukhammed M. N. Ivashchenko N. N. Opanasjuk I. V. Sudzhanskaja |
| author_sort |
A. D. Pogrebnjak |
| title |
Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods |
| title_short |
Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods |
| title_full |
Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods |
| title_fullStr |
Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods |
| title_full_unstemmed |
Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods |
| title_sort |
structural studies of zinc oxide and aluminum nitride films obtained by cvd and magnetron sputtering methods |
| publishDate |
2012 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000906915 |
| work_keys_str_mv |
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| first_indexed |
2024-04-18T05:16:28Z |
| last_indexed |
2024-04-18T05:16:28Z |
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