Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods

Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods

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Bibliographic Details
Date:2012
Main Authors: A. D. Pogrebnjak, A. K.M. Mukhammed, M. N. Ivashchenko, N. N. Opanasjuk, I. V. Sudzhanskaja
Format: Article
Language:English
Published: 2012
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000906915
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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-94133
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spelling open-sciencenbuvgovua-941332024-04-17T17:04:21Z Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods A. D. Pogrebnjak A. K.M. Mukhammed M. N. Ivashchenko N. N. Opanasjuk I. V. Sudzhanskaja 1999-8074 2012 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000906915 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
A. D. Pogrebnjak
A. K.M. Mukhammed
M. N. Ivashchenko
N. N. Opanasjuk
I. V. Sudzhanskaja
Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods
format Article
author A. D. Pogrebnjak
A. K.M. Mukhammed
M. N. Ivashchenko
N. N. Opanasjuk
I. V. Sudzhanskaja
author_facet A. D. Pogrebnjak
A. K.M. Mukhammed
M. N. Ivashchenko
N. N. Opanasjuk
I. V. Sudzhanskaja
author_sort A. D. Pogrebnjak
title Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods
title_short Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods
title_full Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods
title_fullStr Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods
title_full_unstemmed Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods
title_sort structural studies of zinc oxide and aluminum nitride films obtained by cvd and magnetron sputtering methods
publishDate 2012
url http://jnas.nbuv.gov.ua/article/UJRN-0000906915
work_keys_str_mv AT adpogrebnjak structuralstudiesofzincoxideandaluminumnitridefilmsobtainedbycvdandmagnetronsputteringmethods
AT akmmukhammed structuralstudiesofzincoxideandaluminumnitridefilmsobtainedbycvdandmagnetronsputteringmethods
AT mnivashchenko structuralstudiesofzincoxideandaluminumnitridefilmsobtainedbycvdandmagnetronsputteringmethods
AT nnopanasjuk structuralstudiesofzincoxideandaluminumnitridefilmsobtainedbycvdandmagnetronsputteringmethods
AT ivsudzhanskaja structuralstudiesofzincoxideandaluminumnitridefilmsobtainedbycvdandmagnetronsputteringmethods
first_indexed 2025-07-22T13:33:17Z
last_indexed 2025-07-22T13:33:17Z
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