Cover Image

Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods

Saved in:

Bibliographic Details
Date:	2012
Main Authors:	A. D. Pogrebnjak, A. K.M. Mukhammed, M. N. Ivashchenko, N. N. Opanasjuk, I. V. Sudzhanskaja
Format:	Article
Language:	English
Published:	2012
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000906915
Tags:	Add Tag No Tags, Be the first to tag this record!
Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

Institution

Library portal of National Academy of Sciences of Ukraine | LibNAS

Similar Items

The antimicrobial activity of magnetron sputtered Ag doped aluminum oxide coatings in vitro
by: Safonov, V., et al.
Published: (2019)

Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si
by: V. A. Sevrjukova, et al.
Published: (2011)

Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings
by: Yu. S. Borysov, et al.
Published: (2022)

Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
by: Zayats, M.S., et al.
Published: (2010)

Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering
by: V. I. Popovych, et al.
Published: (2016)

Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering
by: V. I. Popovych, et al.
Published: (2016)

Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering
by: A. O. Kozak, et al.
Published: (2015)

Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering
by: O. I. Vjunov, et al.
Published: (2014)

The influence of the magnetron sputtering regime and the composition of the reaction gas on the structure and properties of ITO films
by: A. I. Bazhin, et al.
Published: (2012)

Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods
by: N. A. Vasilenko, et al.
Published: (2013)

Solid ion accelerator based on magnetron sputtering discharge
by: Azarenkov, N.A., et al.
Published: (2004)

Formation of antibacterial coatings on chitosan matrices by magnetron sputtering
by: O. V. Kalinkevich, et al.
Published: (2017)

Development of arc suppression technique for reactive magnetron sputtering
by: S. V. Dudin, et al.
Published: (2005)

Deposition of the stoichiometric coatings by reactive magnetron sputtering
by: A. Sagalovych, et al.
Published: (2012)

Deposition of the stoichiometric coatings by reactive magnetron sputtering
by: Sagalovych, A., et al.
Published: (2012)

Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods
by: Василенко, Наталья Афанасьевна, et al.
Published: (2014)

Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods
by: Василенко, Наталья Афанасьевна, et al.
Published: (2014)

Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target
by: A. A. Onoprienko, et al.
Published: (2015)

Study of mechanisms for obtaining nanostructures of zinc oxide from the vapor phase
by: V. B. Kapustianyk, et al.
Published: (2010)

The influence of physical and technological magnetron sputtering modes on the structure and optical properties of CdS and CdTe films
by: G. S. Khrypunov, et al.
Published: (2017)

Influence of nitrogen on the microstructure, hardness and tribological properties of Cr–Ni–B–C–N films deposited by DC magnetron sputtering
by: O. O. Onopriienko, et al.
Published: (2020)

Structure and properties of Mg, Al, Ti oxide and nitride layers formed by ion-plasma sputtering
by: Pidkova, V., et al.
Published: (2014-12-12)

Structure and Photocatalytic Properties of Titania Nanofilms Deposited by Reactive Magnetron Sputtering
by: A. A. Goncharov, et al.
Published: (2014)

Magnetron sputtered coatings of AlN-TiCrB₂ system
by: Panasyuk, A.D., et al.
Published: (2009)

Comparison of optical properties of TiO₂ thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques
by: Brus, V.V., et al.
Published: (2011)

Digital processing of optical emission spectra of magnetron sputtering plasma system
by: Afanasіeva, I.A., et al.
Published: (2019)

Structure of Fe-Cu coatings prepared by the magnetron sputtering method
by: Nowakowska-Langier, K., et al.
Published: (2010)

The flow density of atoms sputtered from a cathode of cylinder magnetron
by: Panchenko, O.A., et al.
Published: (2005)

Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target
by: A. A. Onoprienko, et al.
Published: (2019)

Structural and optical studies of Cu6PSe5I-based thin film deposited by magnetron sputtering
by: I. P. Studenyak, et al.
Published: (2017)

Structure and properties of the coatings of the Al–B–Si–C system deposited by magnetron sputtering
by: A. O. Kozak, et al.
Published: (2020)

Comparison of optical properties of TiO2 thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques
by: V. V. Brus, et al.
Published: (2011)

Effect of sputtering power on optical properties of nickel oxide electrochromic thin films
by: P. Panprom, et al.
Published: (2020)

Effect of sputtering power on optical properties of nickel oxide electrochromic thin films
by: P. Panprom, et al.
Published: (2020)

The Vacuub Device for Receiving Coatings on the Inner Surface of the Pipes by Magnetron Sputtering
by: V. M. Kolomiiets, et al.
Published: (2020)

Electrical and optical parameters of Cu6PS5I-based thin films deposited using magnetron sputtering
by: I. P. Studenyak, et al.
Published: (2016)

Structural and morphological properties of nanometer carbon films obtained by electron beam sputtering of graphite
by: V. O. Yukhymchuk, et al.
Published: (2023)

Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2
by: I. N. Torianik, et al.
Published: (2013)

Features of coatings deposition in combined stationary-pulsed operation mode of the magnetron sputtering system
by: Chunadra, А.G., et al.
Published: (2017)

Control of planar magnetron sputtering system operating modes by additional anode magnetic field
by: Bizyukov, A.A., et al.
Published: (2010)