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Structural studies of zinc oxide and aluminum nitride films obtained by CVD and magnetron sputtering methods

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Bibliographic Details
Date:	2012
Main Authors:	A. D. Pogrebnjak, A. K.M. Mukhammed, M. N. Ivashchenko, N. N. Opanasjuk, I. V. Sudzhanskaja
Format:	Article
Language:	English
Published:	2012
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000906915
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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