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The influence of the magnetron sputtering regime and the composition of the reaction gas on the structure and properties of ITO films

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Bibliographic Details
Date:	2012
Main Authors:	A. I. Bazhin, A. N. Trotsan, S. V. Chertopalov, A. A. Stipanenko, V. A. Stupak
Format:	Article
Language:	English
Published:	2012
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000908769
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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