Formation of silicon nanoclusters in buried ultra-thin oxide layers
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| Дата: | 2011 |
|---|---|
| Автори: | , , , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2011
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| Назва видання: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000349736 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859547423813140480 |
|---|---|
| author | O. S. Oberemok V. G. Litovchenko D. V. Gamov V. G. Popov V. P. Melnik Yo. Gudymenko V. A. Nikirin I. M. Khatsevich |
| author_facet | O. S. Oberemok V. G. Litovchenko D. V. Gamov V. G. Popov V. P. Melnik Yo. Gudymenko V. A. Nikirin I. M. Khatsevich |
| author_sort | O. S. Oberemok |
| collection | Open-Science |
| first_indexed | 2025-07-22T14:07:38Z |
| format | Article |
| id | open-sciencenbuvgovua-96150 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T14:07:38Z |
| publishDate | 2011 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-961502024-04-17T17:25:09Z Formation of silicon nanoclusters in buried ultra-thin oxide layers O. S. Oberemok V. G. Litovchenko D. V. Gamov V. G. Popov V. P. Melnik Yo. Gudymenko V. A. Nikirin I. M. Khatsevich 1560-8034 2011 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349736 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics O. S. Oberemok V. G. Litovchenko D. V. Gamov V. G. Popov V. P. Melnik Yo. Gudymenko V. A. Nikirin I. M. Khatsevich Formation of silicon nanoclusters in buried ultra-thin oxide layers |
| title | Formation of silicon nanoclusters in buried ultra-thin oxide layers |
| title_full | Formation of silicon nanoclusters in buried ultra-thin oxide layers |
| title_fullStr | Formation of silicon nanoclusters in buried ultra-thin oxide layers |
| title_full_unstemmed | Formation of silicon nanoclusters in buried ultra-thin oxide layers |
| title_short | Formation of silicon nanoclusters in buried ultra-thin oxide layers |
| title_sort | formation of silicon nanoclusters in buried ultra-thin oxide layers |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000349736 |
| work_keys_str_mv | AT osoberemok formationofsiliconnanoclustersinburiedultrathinoxidelayers AT vglitovchenko formationofsiliconnanoclustersinburiedultrathinoxidelayers AT dvgamov formationofsiliconnanoclustersinburiedultrathinoxidelayers AT vgpopov formationofsiliconnanoclustersinburiedultrathinoxidelayers AT vpmelnik formationofsiliconnanoclustersinburiedultrathinoxidelayers AT yogudymenko formationofsiliconnanoclustersinburiedultrathinoxidelayers AT vanikirin formationofsiliconnanoclustersinburiedultrathinoxidelayers AT imkhatsevich formationofsiliconnanoclustersinburiedultrathinoxidelayers |