Formation of silicon nanoclusters in buried ultra-thin oxide layers
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| Date: | 2011 |
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| Main Authors: | , , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2011
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| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000349736 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-96150 |
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open-sciencenbuvgovua-961502024-04-17T17:25:09Z Formation of silicon nanoclusters in buried ultra-thin oxide layers O. S. Oberemok V. G. Litovchenko D. V. Gamov V. G. Popov V. P. Melnik Yo. Gudymenko V. A. Nikirin I. M. Khatsevich 1560-8034 2011 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349736 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics O. S. Oberemok V. G. Litovchenko D. V. Gamov V. G. Popov V. P. Melnik Yo. Gudymenko V. A. Nikirin I. M. Khatsevich Formation of silicon nanoclusters in buried ultra-thin oxide layers |
| format |
Article |
| author |
O. S. Oberemok V. G. Litovchenko D. V. Gamov V. G. Popov V. P. Melnik Yo. Gudymenko V. A. Nikirin I. M. Khatsevich |
| author_facet |
O. S. Oberemok V. G. Litovchenko D. V. Gamov V. G. Popov V. P. Melnik Yo. Gudymenko V. A. Nikirin I. M. Khatsevich |
| author_sort |
O. S. Oberemok |
| title |
Formation of silicon nanoclusters in buried ultra-thin oxide layers |
| title_short |
Formation of silicon nanoclusters in buried ultra-thin oxide layers |
| title_full |
Formation of silicon nanoclusters in buried ultra-thin oxide layers |
| title_fullStr |
Formation of silicon nanoclusters in buried ultra-thin oxide layers |
| title_full_unstemmed |
Formation of silicon nanoclusters in buried ultra-thin oxide layers |
| title_sort |
formation of silicon nanoclusters in buried ultra-thin oxide layers |
| publishDate |
2011 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000349736 |
| work_keys_str_mv |
AT osoberemok formationofsiliconnanoclustersinburiedultrathinoxidelayers AT vglitovchenko formationofsiliconnanoclustersinburiedultrathinoxidelayers AT dvgamov formationofsiliconnanoclustersinburiedultrathinoxidelayers AT vgpopov formationofsiliconnanoclustersinburiedultrathinoxidelayers AT vpmelnik formationofsiliconnanoclustersinburiedultrathinoxidelayers AT yogudymenko formationofsiliconnanoclustersinburiedultrathinoxidelayers AT vanikirin formationofsiliconnanoclustersinburiedultrathinoxidelayers AT imkhatsevich formationofsiliconnanoclustersinburiedultrathinoxidelayers |
| first_indexed |
2025-07-22T14:07:38Z |
| last_indexed |
2025-07-22T14:07:38Z |
| _version_ |
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