Formation of silicon nanoclusters in buried ultra-thin oxide layers - O. S. Oberemok; V. G. Litovchenko; D. V. Gamov; V. G. Popov; V. P. Melnik; Yo. Gudymenko; V. A. Nikirin; I. M. Khatsevich (Semiconductor Physics, Quantum Electronics and Optoelectronics, 2011)