Formation of silicon nanoclusters in buried ultra-thin oxide layers
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| Date: | 2011 |
|---|---|
| Main Authors: | O. S. Oberemok, V. G. Litovchenko, D. V. Gamov, V. G. Popov, V. P. Melnik, Yo. Gudymenko, V. A. Nikirin, I. M. Khatsevich |
| Format: | Article |
| Language: | English |
| Published: |
2011
|
| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000349736 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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