Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum
Збережено в:
| Дата: | 2011 |
|---|---|
| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2011
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| Назва видання: | Optoelectronics and Semiconductor Technique |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000363683 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859547595894947841 |
|---|---|
| author | I. Z. Indutnyi V. I. Mynko Ye. Shepeliavyi M. V. Sopinskyi V. M. Tkach V. A. Danko |
| author_facet | I. Z. Indutnyi V. I. Mynko Ye. Shepeliavyi M. V. Sopinskyi V. M. Tkach V. A. Danko |
| author_sort | I. Z. Indutnyi |
| collection | Open-Science |
| first_indexed | 2025-07-22T14:13:24Z |
| format | Article |
| id | open-sciencenbuvgovua-96493 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T14:13:24Z |
| publishDate | 2011 |
| record_format | dspace |
| series | Optoelectronics and Semiconductor Technique |
| spelling | open-sciencenbuvgovua-964932024-04-17T17:27:11Z Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum I. Z. Indutnyi V. I. Mynko Ye. Shepeliavyi M. V. Sopinskyi V. M. Tkach V. A. Danko 2707-6806 2011 en Optoelectronics and Semiconductor Technique http://jnas.nbuv.gov.ua/article/UJRN-0000363683 Article |
| spellingShingle | Optoelectronics and Semiconductor Technique I. Z. Indutnyi V. I. Mynko Ye. Shepeliavyi M. V. Sopinskyi V. M. Tkach V. A. Danko Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum |
| title | Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum |
| title_full | Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum |
| title_fullStr | Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum |
| title_full_unstemmed | Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum |
| title_short | Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum |
| title_sort | growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000363683 |
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