Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum

Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum

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Bibliographic Details
Date:2011
Main Authors: I. Z. Indutnyi, V. I. Mynko, Ye. Shepeliavyi, M. V. Sopinskyi, V. M. Tkach, V. A. Danko
Format: Article
Language:English
Published: 2011
Series:Optoelectronics and Semiconductor Technique
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000363683
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-96493
record_format dspace
spelling open-sciencenbuvgovua-964932024-04-17T17:27:11Z Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum I. Z. Indutnyi V. I. Mynko Ye. Shepeliavyi M. V. Sopinskyi V. M. Tkach V. A. Danko 2707-6806 2011 en Optoelectronics and Semiconductor Technique http://jnas.nbuv.gov.ua/article/UJRN-0000363683 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Optoelectronics and Semiconductor Technique
spellingShingle Optoelectronics and Semiconductor Technique
I. Z. Indutnyi
V. I. Mynko
Ye. Shepeliavyi
M. V. Sopinskyi
V. M. Tkach
V. A. Danko
Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum
format Article
author I. Z. Indutnyi
V. I. Mynko
Ye. Shepeliavyi
M. V. Sopinskyi
V. M. Tkach
V. A. Danko
author_facet I. Z. Indutnyi
V. I. Mynko
Ye. Shepeliavyi
M. V. Sopinskyi
V. M. Tkach
V. A. Danko
author_sort I. Z. Indutnyi
title Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum
title_short Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum
title_full Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum
title_fullStr Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum
title_full_unstemmed Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum
title_sort growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum
publishDate 2011
url http://jnas.nbuv.gov.ua/article/UJRN-0000363683
work_keys_str_mv AT izindutnyi growthofthephotonicnanostructuresusinginterferencelithographyandobliquedepositioninvacuum
AT vimynko growthofthephotonicnanostructuresusinginterferencelithographyandobliquedepositioninvacuum
AT yeshepeliavyi growthofthephotonicnanostructuresusinginterferencelithographyandobliquedepositioninvacuum
AT mvsopinskyi growthofthephotonicnanostructuresusinginterferencelithographyandobliquedepositioninvacuum
AT vmtkach growthofthephotonicnanostructuresusinginterferencelithographyandobliquedepositioninvacuum
AT vadanko growthofthephotonicnanostructuresusinginterferencelithographyandobliquedepositioninvacuum
first_indexed 2025-07-22T14:13:24Z
last_indexed 2025-07-22T14:13:24Z
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