Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum
Збережено в:
| Дата: | 2011 |
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| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2011
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| Назва видання: | Optoelectronics and Semiconductor Technique |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000363683 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-96493 |
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dspace |
| spelling |
open-sciencenbuvgovua-964932024-04-17T17:27:11Z Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum I. Z. Indutnyi V. I. Mynko Ye. Shepeliavyi M. V. Sopinskyi V. M. Tkach V. A. Danko 2707-6806 2011 en Optoelectronics and Semiconductor Technique http://jnas.nbuv.gov.ua/article/UJRN-0000363683 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Optoelectronics and Semiconductor Technique |
| spellingShingle |
Optoelectronics and Semiconductor Technique I. Z. Indutnyi V. I. Mynko Ye. Shepeliavyi M. V. Sopinskyi V. M. Tkach V. A. Danko Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum |
| format |
Article |
| author |
I. Z. Indutnyi V. I. Mynko Ye. Shepeliavyi M. V. Sopinskyi V. M. Tkach V. A. Danko |
| author_facet |
I. Z. Indutnyi V. I. Mynko Ye. Shepeliavyi M. V. Sopinskyi V. M. Tkach V. A. Danko |
| author_sort |
I. Z. Indutnyi |
| title |
Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum |
| title_short |
Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum |
| title_full |
Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum |
| title_fullStr |
Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum |
| title_full_unstemmed |
Growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum |
| title_sort |
growth of the photonic nanostruc-tures using interference lithography and oblique deposition in vacuum |
| publishDate |
2011 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000363683 |
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2024-04-18T05:26:03Z |
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2024-04-18T05:26:03Z |
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