Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si
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| Date: | 2011 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2011
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| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000889993 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859601926731071488 |
|---|---|
| author | V. A. Sevrjukova E. N. Zubarev V. V. Kondratenko Ju. P. Pershin V. O. Tsebenko |
| author_facet | V. A. Sevrjukova E. N. Zubarev V. V. Kondratenko Ju. P. Pershin V. O. Tsebenko |
| author_sort | V. A. Sevrjukova |
| collection | Open-Science |
| first_indexed | 2025-07-22T14:54:01Z |
| format | Article |
| id | open-sciencenbuvgovua-98630 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T14:54:01Z |
| publishDate | 2011 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-986302024-04-17T17:43:17Z Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si V. A. Sevrjukova E. N. Zubarev V. V. Kondratenko Ju. P. Pershin V. O. Tsebenko 1999-8074 2011 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000889993 Article |
| spellingShingle | Physical surface engineering V. A. Sevrjukova E. N. Zubarev V. V. Kondratenko Ju. P. Pershin V. O. Tsebenko Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si |
| title | Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si |
| title_full | Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si |
| title_fullStr | Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si |
| title_full_unstemmed | Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si |
| title_short | Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si |
| title_sort | evolution of the structure of mo films obtained by magnetron sputtering on a-si |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000889993 |
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