Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si
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| Дата: | 2011 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2011
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000889993 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-98630 |
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open-sciencenbuvgovua-986302024-04-17T17:43:17Z Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si V. A. Sevrjukova E. N. Zubarev V. V. Kondratenko Ju. P. Pershin V. O. Tsebenko 1999-8074 2011 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000889993 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering V. A. Sevrjukova E. N. Zubarev V. V. Kondratenko Ju. P. Pershin V. O. Tsebenko Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si |
| format |
Article |
| author |
V. A. Sevrjukova E. N. Zubarev V. V. Kondratenko Ju. P. Pershin V. O. Tsebenko |
| author_facet |
V. A. Sevrjukova E. N. Zubarev V. V. Kondratenko Ju. P. Pershin V. O. Tsebenko |
| author_sort |
V. A. Sevrjukova |
| title |
Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si |
| title_short |
Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si |
| title_full |
Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si |
| title_fullStr |
Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si |
| title_full_unstemmed |
Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si |
| title_sort |
evolution of the structure of mo films obtained by magnetron sputtering on a-si |
| publishDate |
2011 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000889993 |
| work_keys_str_mv |
AT vasevrjukova evolutionofthestructureofmofilmsobtainedbymagnetronsputteringonasi AT enzubarev evolutionofthestructureofmofilmsobtainedbymagnetronsputteringonasi AT vvkondratenko evolutionofthestructureofmofilmsobtainedbymagnetronsputteringonasi AT juppershin evolutionofthestructureofmofilmsobtainedbymagnetronsputteringonasi AT votsebenko evolutionofthestructureofmofilmsobtainedbymagnetronsputteringonasi |
| first_indexed |
2024-04-18T05:34:47Z |
| last_indexed |
2024-04-18T05:34:47Z |
| _version_ |
1796887571836436480 |