Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si

Gespeichert in:
Bibliographische Detailangaben
Datum:2011
Hauptverfasser: V. A. Sevrjukova, E. N. Zubarev, V. V. Kondratenko, Ju. P. Pershin, V. O. Tsebenko
Format: Artikel
Sprache:Englisch
Veröffentlicht: 2011
Schriftenreihe:Physical surface engineering
Online Zugang:http://jnas.nbuv.gov.ua/article/UJRN-0000889993
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

Institution

Library portal of National Academy of Sciences of Ukraine | LibNAS
_version_ 1859601926731071488
author V. A. Sevrjukova
E. N. Zubarev
V. V. Kondratenko
Ju. P. Pershin
V. O. Tsebenko
author_facet V. A. Sevrjukova
E. N. Zubarev
V. V. Kondratenko
Ju. P. Pershin
V. O. Tsebenko
author_sort V. A. Sevrjukova
collection Open-Science
first_indexed 2025-07-22T14:54:01Z
format Article
id open-sciencenbuvgovua-98630
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
language English
last_indexed 2025-07-22T14:54:01Z
publishDate 2011
record_format dspace
series Physical surface engineering
spelling open-sciencenbuvgovua-986302024-04-17T17:43:17Z Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si V. A. Sevrjukova E. N. Zubarev V. V. Kondratenko Ju. P. Pershin V. O. Tsebenko 1999-8074 2011 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000889993 Article
spellingShingle Physical surface engineering
V. A. Sevrjukova
E. N. Zubarev
V. V. Kondratenko
Ju. P. Pershin
V. O. Tsebenko
Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si
title Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si
title_full Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si
title_fullStr Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si
title_full_unstemmed Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si
title_short Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si
title_sort evolution of the structure of mo films obtained by magnetron sputtering on a-si
url http://jnas.nbuv.gov.ua/article/UJRN-0000889993
work_keys_str_mv AT vasevrjukova evolutionofthestructureofmofilmsobtainedbymagnetronsputteringonasi
AT enzubarev evolutionofthestructureofmofilmsobtainedbymagnetronsputteringonasi
AT vvkondratenko evolutionofthestructureofmofilmsobtainedbymagnetronsputteringonasi
AT juppershin evolutionofthestructureofmofilmsobtainedbymagnetronsputteringonasi
AT votsebenko evolutionofthestructureofmofilmsobtainedbymagnetronsputteringonasi