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Evolution of the structure of Mo films obtained by magnetron sputtering on a-Si

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Bibliographic Details
Date:	2011
Main Authors:	V. A. Sevrjukova, E. N. Zubarev, V. V. Kondratenko, Ju. P. Pershin, V. O. Tsebenko
Format:	Article
Language:	English
Published:	2011
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000889993
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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