Optical properties of submicron silicon oxide films after high-temperature processing
Збережено в:
| Дата: | 2011 |
|---|---|
| Автори: | , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2011
|
| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000892715 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
Репозиторії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-98657 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-986572024-04-17T17:43:35Z Optical properties of submicron silicon oxide films after high-temperature processing V. V. Litvinenko V. E. Rodionov N. A. Rodionova I. N. Shmidko 1999-8074 2011 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000892715 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering V. V. Litvinenko V. E. Rodionov N. A. Rodionova I. N. Shmidko Optical properties of submicron silicon oxide films after high-temperature processing |
| format |
Article |
| author |
V. V. Litvinenko V. E. Rodionov N. A. Rodionova I. N. Shmidko |
| author_facet |
V. V. Litvinenko V. E. Rodionov N. A. Rodionova I. N. Shmidko |
| author_sort |
V. V. Litvinenko |
| title |
Optical properties of submicron silicon oxide films after high-temperature processing |
| title_short |
Optical properties of submicron silicon oxide films after high-temperature processing |
| title_full |
Optical properties of submicron silicon oxide films after high-temperature processing |
| title_fullStr |
Optical properties of submicron silicon oxide films after high-temperature processing |
| title_full_unstemmed |
Optical properties of submicron silicon oxide films after high-temperature processing |
| title_sort |
optical properties of submicron silicon oxide films after high-temperature processing |
| publishDate |
2011 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000892715 |
| work_keys_str_mv |
AT vvlitvinenko opticalpropertiesofsubmicronsiliconoxidefilmsafterhightemperatureprocessing AT verodionov opticalpropertiesofsubmicronsiliconoxidefilmsafterhightemperatureprocessing AT narodionova opticalpropertiesofsubmicronsiliconoxidefilmsafterhightemperatureprocessing AT inshmidko opticalpropertiesofsubmicronsiliconoxidefilmsafterhightemperatureprocessing |
| first_indexed |
2024-04-18T05:34:53Z |
| last_indexed |
2024-04-18T05:34:53Z |
| _version_ |
1796887574669688832 |