Optical properties of submicron silicon oxide films after high-temperature processing
Збережено в:
| Дата: | 2011 |
|---|---|
| Автори: | , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2011
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000892715 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859601931019747328 |
|---|---|
| author | V. V. Litvinenko V. E. Rodionov N. A. Rodionova I. N. Shmidko |
| author_facet | V. V. Litvinenko V. E. Rodionov N. A. Rodionova I. N. Shmidko |
| author_sort | V. V. Litvinenko |
| collection | Open-Science |
| first_indexed | 2025-07-22T14:54:10Z |
| format | Article |
| id | open-sciencenbuvgovua-98657 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T14:54:10Z |
| publishDate | 2011 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-986572024-04-17T17:43:35Z Optical properties of submicron silicon oxide films after high-temperature processing V. V. Litvinenko V. E. Rodionov N. A. Rodionova I. N. Shmidko 1999-8074 2011 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000892715 Article |
| spellingShingle | Physical surface engineering V. V. Litvinenko V. E. Rodionov N. A. Rodionova I. N. Shmidko Optical properties of submicron silicon oxide films after high-temperature processing |
| title | Optical properties of submicron silicon oxide films after high-temperature processing |
| title_full | Optical properties of submicron silicon oxide films after high-temperature processing |
| title_fullStr | Optical properties of submicron silicon oxide films after high-temperature processing |
| title_full_unstemmed | Optical properties of submicron silicon oxide films after high-temperature processing |
| title_short | Optical properties of submicron silicon oxide films after high-temperature processing |
| title_sort | optical properties of submicron silicon oxide films after high-temperature processing |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000892715 |
| work_keys_str_mv | AT vvlitvinenko opticalpropertiesofsubmicronsiliconoxidefilmsafterhightemperatureprocessing AT verodionov opticalpropertiesofsubmicronsiliconoxidefilmsafterhightemperatureprocessing AT narodionova opticalpropertiesofsubmicronsiliconoxidefilmsafterhightemperatureprocessing AT inshmidko opticalpropertiesofsubmicronsiliconoxidefilmsafterhightemperatureprocessing |