Optical properties of submicron silicon oxide films after high-temperature processing

Optical properties of submicron silicon oxide films after high-temperature processing

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Bibliographic Details
Date:2011
Main Authors: V. V. Litvinenko, V. E. Rodionov, N. A. Rodionova, I. N. Shmidko
Format: Article
Language:English
Published: 2011
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000892715
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-98657
record_format dspace
spelling open-sciencenbuvgovua-986572024-04-17T17:43:35Z Optical properties of submicron silicon oxide films after high-temperature processing V. V. Litvinenko V. E. Rodionov N. A. Rodionova I. N. Shmidko 1999-8074 2011 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000892715 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
V. V. Litvinenko
V. E. Rodionov
N. A. Rodionova
I. N. Shmidko
Optical properties of submicron silicon oxide films after high-temperature processing
format Article
author V. V. Litvinenko
V. E. Rodionov
N. A. Rodionova
I. N. Shmidko
author_facet V. V. Litvinenko
V. E. Rodionov
N. A. Rodionova
I. N. Shmidko
author_sort V. V. Litvinenko
title Optical properties of submicron silicon oxide films after high-temperature processing
title_short Optical properties of submicron silicon oxide films after high-temperature processing
title_full Optical properties of submicron silicon oxide films after high-temperature processing
title_fullStr Optical properties of submicron silicon oxide films after high-temperature processing
title_full_unstemmed Optical properties of submicron silicon oxide films after high-temperature processing
title_sort optical properties of submicron silicon oxide films after high-temperature processing
publishDate 2011
url http://jnas.nbuv.gov.ua/article/UJRN-0000892715
work_keys_str_mv AT vvlitvinenko opticalpropertiesofsubmicronsiliconoxidefilmsafterhightemperatureprocessing
AT verodionov opticalpropertiesofsubmicronsiliconoxidefilmsafterhightemperatureprocessing
AT narodionova opticalpropertiesofsubmicronsiliconoxidefilmsafterhightemperatureprocessing
AT inshmidko opticalpropertiesofsubmicronsiliconoxidefilmsafterhightemperatureprocessing
first_indexed 2025-07-22T14:54:10Z
last_indexed 2025-07-22T14:54:10Z
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