Optical properties of submicron silicon oxide films after high-temperature processing
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| Datum: | 2011 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2011
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| Schriftenreihe: | Physical surface engineering |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000892715 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-986572024-04-17T17:43:35Z Optical properties of submicron silicon oxide films after high-temperature processing V. V. Litvinenko V. E. Rodionov N. A. Rodionova I. N. Shmidko 1999-8074 2011 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000892715 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering V. V. Litvinenko V. E. Rodionov N. A. Rodionova I. N. Shmidko Optical properties of submicron silicon oxide films after high-temperature processing |
| format |
Article |
| author |
V. V. Litvinenko V. E. Rodionov N. A. Rodionova I. N. Shmidko |
| author_facet |
V. V. Litvinenko V. E. Rodionov N. A. Rodionova I. N. Shmidko |
| author_sort |
V. V. Litvinenko |
| title |
Optical properties of submicron silicon oxide films after high-temperature processing |
| title_short |
Optical properties of submicron silicon oxide films after high-temperature processing |
| title_full |
Optical properties of submicron silicon oxide films after high-temperature processing |
| title_fullStr |
Optical properties of submicron silicon oxide films after high-temperature processing |
| title_full_unstemmed |
Optical properties of submicron silicon oxide films after high-temperature processing |
| title_sort |
optical properties of submicron silicon oxide films after high-temperature processing |
| publishDate |
2011 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000892715 |
| work_keys_str_mv |
AT vvlitvinenko opticalpropertiesofsubmicronsiliconoxidefilmsafterhightemperatureprocessing AT verodionov opticalpropertiesofsubmicronsiliconoxidefilmsafterhightemperatureprocessing AT narodionova opticalpropertiesofsubmicronsiliconoxidefilmsafterhightemperatureprocessing AT inshmidko opticalpropertiesofsubmicronsiliconoxidefilmsafterhightemperatureprocessing |
| first_indexed |
2025-07-22T14:54:10Z |
| last_indexed |
2025-07-22T14:54:10Z |
| _version_ |
1850421799136788480 |