Роль механiчних напружень при iоннiй імплантацiї твердих розчинiв CdHgTe

• Date: 2018
• Main Authors: Smirnov, A. B., Lytvyn, O. S., Morozhenko, V. A., Savkina, R. K., Smoliy, M. I., Udovytska, R. S., Sizov, F. F.
• Format: Article
• Language: English; Ukrainian
• Published: Publishing house "Academperiodika" 2018
• Subjects: iонна iмплантацiя; наноструктуювання; напiвпровiдникова структура
• Online Access: https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2018364
• Journal Title: Ukrainian Journal of Physics

The properties of n-CdxHg1 xTe/CdZnTe (x = 0.223) structures implanted with B+ and Ag+ ions with an energy of 100 keV to a dose of 3 x 10^13 cm^-2 are studied. The software package TRIM_2008 was applied to simulate the ion implantation process. The surface morphology of heterostructures and their op...