Вплив пеннiнговської iонiзацiї на баланс заряджених частинок у плазмi стацiонарного вiдбивного розряду
A model of stationary reflex discharge, which is based on the volume-averaged (global) one, has been considered in the case of weakly ionized non-isothermal plasma. The temperature and the density of plasma electrons are calculated. The process of cathode sputtering and the formation of sputtered io...
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| Date: | 2019 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Publishing house "Academperiodika"
2019
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| Online Access: | https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2019048 |
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| Journal Title: | Ukrainian Journal of Physics |
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Ukrainian Journal of Physics| Summary: | A model of stationary reflex discharge, which is based on the volume-averaged (global) one, has been considered in the case of weakly ionized non-isothermal plasma. The temperature and the density of plasma electrons are calculated. The process of cathode sputtering and the formation of sputtered ions by means of the electron impact ionization, Penning ionization, and sputtered ion charge exchange at gas ions in plasma are analyzed. The dependence of the ionization degree of sputtered atoms on plasma parameters is determined. The influence of the Penning ionization on the balance of charged particles in plasma is considered. |
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