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Вплив пеннiнговської iонiзацiї на баланс заряджених частинок у плазмi стацiонарного вiдбивного розряду

A model of stationary reflex discharge, which is based on the volume-averaged (global) one, has been considered in the case of weakly ionized non-isothermal plasma. The temperature and the density of plasma electrons are calculated. The process of cathode sputtering and the formation of sputtered io...

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Bibliographic Details
Date:2019
Main Authors: Kovtun, Yu. V., Ozerov, A. N., Skibenko, E. I., Yuferov, V. B.
Format: Article
Language:English
Published: Publishing house "Academperiodika" 2019
Online Access:https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2019048
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Journal Title:Ukrainian Journal of Physics

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Ukrainian Journal of Physics

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