Вплив пеннiнговської iонiзацiї на баланс заряджених частинок у плазмi стацiонарного вiдбивного розряду

• Date: 2019
• Main Authors: Kovtun, Yu. V., Ozerov, A. N., Skibenko, E. I., Yuferov, V. B.
• Format: Article
• Language: English
• Published: Publishing house "Academperiodika" 2019
• Online Access: https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2019048
• Journal Title: Ukrainian Journal of Physics

A model of stationary reflex discharge, which is based on the volume-averaged (global) one, has been considered in the case of weakly ionized non-isothermal plasma. The temperature and the density of plasma electrons are calculated. The process of cathode sputtering and the formation of sputtered io...