Формування нанорозмiрних фаз при акусто-стимульованому iонно-променевому синтезi

• Date: 2019
• Main Authors: Litovchenko, V. G., Melnik, V. P., Romanjuk, B. M.
• Format: Article
• Language: English; Ukrainian
• Published: Publishing house "Academperiodika" 2019
• Subjects: iонна iмплантацiя; ультразвукове збудження; дефекти; дифузiя; нанокластери; прихованi шари
• Online Access: https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2019288
• Journal Title: Ukrainian Journal of Physics

The results of researches on the interaction of accelerated ions with a solid at the in situ ultra-sonic treatment are reported. A proposed combined method of acoustically stimulated ion beam doping of solid-state targets allows one to efficiently control the redistribution of radiation-induced defe...