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Формування нанокристалічного кремнію в плівках аморфного кремнію, легованого оловом

The process of crystalline silicon phase formation in tin-doped amorphous silicon (a-SiSn) films has been studied. The inclusions of metallic tin are shown to play a key role in the crystallization of researched a-SiSn specimens with Sn contents of 1–10 at% at temperatures of 300–500 ∘C. The crystal...

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Bibliographic Details
Main Authors:	Rudenko, R. M., Voitsihovska, O. O., Voitovych, V. V., Kras’ko, M. M., Kolosyuk, A. G., Povarchuk, V. Yu., Rudenko, M. P., Knorozok, L. M.
Format:	Article
Language:	English Ukrainian
Published:	Publishing house "Academperiodika" 2020
Subjects:	нанокристалiчний кремнiй метало-iндукована кристалiзацiя олово - nanocrystalline silicon metal-induced crystallization tin
Online Access:	https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2019570
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Формування нанокристалічного кремнію в плівках аморфного кремнію, легованого оловом

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