Осадження металічних плівок на мікрочастинки у пастці ВЧ магнетронного розряду

• Date: 2022
• Main Authors: Pal, A.F., Rudavets, A.G., Ryabinkin, A.N., Serov, A.O.
• Format: Article
• Language: English
• Published: Publishing house "Academperiodika" 2022
• Subjects: -
• Online Access: https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2021437
• Journal Title: Ukrainian Journal of Physics

The technique for a metal film deposition on spherical microparticles in an RF plasma trap is presented. Both the particle confinement and the electrode sputtering are performed by a single RF magnetron discharge. The samples of a coated spheres are obtained and examined. The technique allows confin...