2025-02-23T08:32:27-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22ujp2-article-2021437%22&qt=morelikethis&rows=5
2025-02-23T08:32:27-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22ujp2-article-2021437%22&qt=morelikethis&rows=5
2025-02-23T08:32:27-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-23T08:32:27-05:00 DEBUG: Deserialized SOLR response
Осадження металічних плівок на мікрочастинки у пастці ВЧ магнетронного розряду
The technique for a metal film deposition on spherical microparticles in an RF plasma trap is presented. Both the particle confinement and the electrode sputtering are performed by a single RF magnetron discharge. The samples of a coated spheres are obtained and examined. The technique allows confin...
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Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Publishing house "Academperiodika"
2022
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Subjects: | |
Online Access: | https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2021437 |
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