Вплив точкових дефектів на рівноважну концентрацію міжвузлового кисню у кристалічному кремнії
The effect of excess point defects on the equilibrium concentration of interstitial oxygen for the system of interstitial oxygen/SiO2 precipitates in crystalline Si is theoretically investigated. The expression for the equilibrium concentration of interstitial oxygen in Si modified by the excess poi...
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| Date: | 2022 |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
Publishing house "Academperiodika"
2022
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| Subjects: | |
| Online Access: | https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2022078 |
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| Journal Title: | Ukrainian Journal of Physics |