Зменшення рекомбінаційних втрат у дифузійних приповерхневих емітерних шарах фоточутливих кремнієвих структур n+-p-p+
When creating an n+-emitter in photosensitive structures of the n+-p-p+ type, the structure of its near-surface layer after the diffusion operation is found to be substantially damaged with increased recombination losses. The influence of additional growing-etching cycles of the silicon dioxide laye...
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| Date: | 2023 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | English Ukrainian |
| Published: |
Publishing house "Academperiodika"
2023
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| Subjects: | |
| Online Access: | https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2023178 |
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| Journal Title: | Ukrainian Journal of Physics |