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SiC film
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Дослідження плівок SiC, отриманих на підкладинці porous-Si/Si
by
Kidalov, V. V.
,
Dyadenchuk, A. F.
,
Zhuk, A. G.
,
Gudimenko, O. Y.
,
Simchenko, S. V.
Published 2024
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Institution
Chemistry, Physics and Technology of Surface
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Article
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Dyadenchuk, A. F.
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Gudimenko, O. Y.
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Kidalov, V. V.
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Simchenko, S. V.
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Zhuk, A. G.
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Ukrainian
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