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Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist
by
Lytvyn, P.M.
,
Malyuta, S.V.
,
Indutnyi, I.Z.
,
Efremov, A.A.
,
Slobodyan, O.V.
,
Min’ko, V.I.
,
Nazarov, A.N.
,
Borysov, O.V.
,
Prokopenko, I.V.
Published in
Semiconductor Physics Quantum Electronics & Optoelectronics
(2018)
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Institution
Digital Library of Periodicals of National Academy of Sciences of Ukraine
1 results
1
Format
Article
1 results
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Author
Borysov, O.V.
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1
Efremov, A.A.
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Indutnyi, I.Z.
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Lytvyn, P.M.
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1
Malyuta, S.V.
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1
Min’ko, V.I.
1 results
1
Nazarov, A.N.
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1
Prokopenko, I.V.
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Slobodyan, O.V.
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Language
English
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