Showing
1 - 1
results of
1
for search '
'
Skip to content
VuFind
Your Account
Log Out
Login
Language
English
Deutsch
Українська
All Fields
Title
Journal Title
Author
Subject
Description
Tag
Find
Advanced
Reset Filters
Suggested Topics:
plasma-chemical etching
Reset Filters
Show filters (1)
Suggested Topics:
plasma-chemical etching
Search Results
Suggested Topics within your search.
Suggested Topics within your search.
-
1
bias voltage
1
optical spectroscopy
1
plasma-chemical etching
plasma-chemical reactor
1
radio-frequency discharge
1
sputtering
1
Showing
1 - 1
results of
1
for search '
'
, query time: 0.01s
Refine Results
Sort
Relevance
Date Descending
Date Ascending
Call Number
Author
Title
Select Page | with selected:
Email
Export
Print
Save
Select result number 1
1
Спектроскопiчнi дослiдження плазми високочастотного розряду при плазмохiмiчному травленнi епiтаксiальних структур нiтриду галiю...
by
Hladkovskiy, V. V.
,
Fedorovich, O. A.
Published 2018
Get full text
Article
Save to List
Saved in:
Select Page | with selected:
Email
Export
Print
Save
Search Tools:
RSS Feed
–
Email Search
–
Save Search
–
Alert schedule: None
Back
Refine Results
Institution
Ukrainian Journal of Physics
1
Format
Article
1
Author
Fedorovich, O. A.
1
Hladkovskiy, V. V.
1
Language
English
1
Year of Publication
From:
To: