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высокочистые материалы
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Комплексный подход к получению высокочистых материалов для микроэлектроники
by
Azhazha, V. M.
,
Kovtun, G. P.
,
Nekljudov, I. M.
Published in
Технологія та конструювання в електронній апаратурі
(2002)
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Institution
Technology and design in electronic equipment
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Azhazha, V. M.
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Kovtun, G. P.
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Nekljudov, I. M.
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Somali
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