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chemical cutting
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contactless chemical‑mechanical polishing
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semiconductor substrates
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бесконтактное химико‑механическое полирование
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Моделирование процессов бесконтактного химикомеханического изготовления подложек полупроводников...
by
Grigoriev, N. N.
,
Kravetsky, M. Yu.
,
Pashchenko, G. A.
,
Sypko, S. A.
,
Fomin, A. V.
Published 2003
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Institution
Technology and design in electronic equipment
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1
Format
Article
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Author
Fomin, A. V.
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Grigoriev, N. N.
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Kravetsky, M. Yu
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Pashchenko, G. A.
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Sypko, S. A.
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Ukrainian
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