Showing
1 - 1
results of
1
for search '
'
Skip to content
VuFind
Your Account
Log Out
Login
Language
English
Deutsch
Українська
Open Science Harvester of NAS of Ukraine
All Fields
Title
Journal Title
Author
Subject
Description
Tag
Full text
Find
Advanced
Reset Filters
Suggested Topics:
mesastructure
Reset Filters
Show filters (1)
Suggested Topics:
mesastructure
Search Results
Suggested Topics within your search.
Suggested Topics within your search.
4NSiC silicon carbide
1
diode chip
1
ion-plasma etching
1
mesastructure
p–i–n-diode
1
p–i–n-диод
1
silicon etching
1
карбид кремния 4НSiC
1
мезаструктура
1
травление ионно-плазменное
1
травление кремния
1
чип диода
1
Showing
1 - 1
results of
1
for search '
'
, query time: 0.00s
Refine Results
Sort
Relevance
Date Descending
Date Ascending
Call Number
Author
Title
Select Page | with selected:
Email
Export
Print
Save
Select result number 1
1
Формирование мезаструктур 4НSiC p–i–n-диодов методом ионно-плазменного травления
by
Boltovets, M. S.
,
Borisenko, A. G.
,
Ivanov, V. N.
,
Fedorovich, О. А.
,
Krivutsa, V. A.
,
Polozov, B. P.
Published 2009
Get full text
Article
Save to List
Saved in:
Select Page | with selected:
Email
Export
Print
Save
Search Tools:
RSS Feed
–
Email Search
–
Save Search
Back
Refine Results
Institution
Technology and design in electronic equipment
1
Format
Article
1
Author
Boltovets, M. S.
1
Borisenko, A. G.
1
Fedorovich, О. А
1
Ivanov, V. N.
1
Krivutsa, V. A.
1
Polozov, B. P.
1
Language
Ukrainian
1
Year of Publication
From:
To: