Результати пошуку - плазмохимическое травление полупроводниковых материалов* :: Harvester open publications of NAS Ukraine

2026-02-07T11:28:22+00:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&spellcheck=true&facet=true&facet.limit=30&facet.field=topic_facet&facet.field=institution&facet.field=building&facet.field=format&facet.field=callnumber-first&facet.field=author_facet&facet.field=language&facet.field=genre_facet&facet.field=era_facet&facet.field=geographic_facet&facet.field=publishDate&facet.sort=count&facet.mincount=1&sort=score+desc%2Cid+asc&hl=true&hl.simple.pre=%7B%7B%7B%7BSTART_HILITE%7D%7D%7D%7D&hl.simple.post=%7B%7B%7B%7BEND_HILITE%7D%7D%7D%7D&spellcheck.dictionary=default&wt=json&json.nl=arrarr&rows=20&start=0&spellcheck.q=%D0%BF%D0%BB%D0%B0%C2%AD%D0%B7%C2%AD%D0%BC%D0%BE%C2%AD%D1%85%D0%B8%C2%AD%D0%BC%D0%B8%C2%AD%D1%87%D0%B5%D1%81%D0%BA%D0%BE%D0%B5+%D1%82%D1%80%D0%B0%D0%B2%D0%BB%D0%B5%D0%BD%D0%B8%D0%B5+%D0%BF%D0%BE%D0%BB%D1%83%D0%BF%D1%80%D0%BE%D0%B2%D0%BE%D0%B4%D0%BD%D0%B8%D0%BA%D0%BE%D0%B2%D1%8B%D1%85+%D0%BC%D0%B0%D1%82%D0%B5%D1%80%D0%B8%D0%B0%D0%BB%D0%BE%D0%B2%2A&qf=title_short%5E750+title_full_unstemmed%5E600+title_full%5E400+title%5E500+title_alt%5E200+title_new%5E100+series%5E50+series2%5E30+author%5E300+contents%5E10+topic_unstemmed%5E550+topic%5E500+geographic%5E300+genre%5E300+allfields_unstemmed%5E10+fulltext_unstemmed%5E10+allfields+fulltext+description+isbn+issn+long_lat_display&qt=edismax&mm=0%25&hl.fl=title_short%2Ctitle_full_unstemmed%2Ctitle_full%2Ctitle%2Ctitle_alt%2Ctitle_new%2Cseries%2Cseries2%2Cauthor%2Ccontents%2Ctopic_unstemmed%2Ctopic%2Cgeographic%2Cgenre%2Callfields_unstemmed%2Cfulltext_unstemmed%2Callfields%2Cfulltext%2Cdescription%2Cisbn%2Cissn%2Clong_lat_display&q=%D0%BF%D0%BB%D0%B0%C2%AD%D0%B7%C2%AD%D0%BC%D0%BE%C2%AD%D1%85%D0%B8%C2%AD%D0%BC%D0%B8%C2%AD%D1%87%D0%B5%D1%81%D0%BA%D0%BE%D0%B5+%D1%82%D1%80%D0%B0%D0%B2%D0%BB%D0%B5%D0%BD%D0%B8%D0%B5+%D0%BF%D0%BE%D0%BB%D1%83%D0%BF%D1%80%D0%BE%D0%B2%D0%BE%D0%B4%D0%BD%D0%B8%D0%BA%D0%BE%D0%B2%D1%8B%D1%85+%D0%BC%D0%B0%D1%82%D0%B5%D1%80%D0%B8%D0%B0%D0%BB%D0%BE%D0%B2%2A

2026-02-07T11:28:22+00:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&spellcheck=true&facet=true&facet.limit=30&facet.field=topic_facet&facet.field=institution&facet.field=building&facet.field=format&facet.field=callnumber-first&facet.field=author_facet&facet.field=language&facet.field=genre_facet&facet.field=era_facet&facet.field=geographic_facet&facet.field=publishDate&facet.sort=count&facet.mincount=1&sort=score+desc%2Cid+asc&hl=true&hl.simple.pre=%7B%7B%7B%7BSTART_HILITE%7D%7D%7D%7D&hl.simple.post=%7B%7B%7B%7BEND_HILITE%7D%7D%7D%7D&spellcheck.dictionary=default&wt=json&json.nl=arrarr&rows=20&start=0&spellcheck.q=%D0%BF%D0%BB%D0%B0%C2%AD%D0%B7%C2%AD%D0%BC%D0%BE%C2%AD%D1%85%D0%B8%C2%AD%D0%BC%D0%B8%C2%AD%D1%87%D0%B5%D1%81%D0%BA%D0%BE%D0%B5+%D1%82%D1%80%D0%B0%D0%B2%D0%BB%D0%B5%D0%BD%D0%B8%D0%B5+%D0%BF%D0%BE%D0%BB%D1%83%D0%BF%D1%80%D0%BE%D0%B2%D0%BE%D0%B4%D0%BD%D0%B8%D0%BA%D0%BE%D0%B2%D1%8B%D1%85+%D0%BC%D0%B0%D1%82%D0%B5%D1%80%D0%B8%D0%B0%D0%BB%D0%BE%D0%B2%2A&qf=title_short%5E750+title_full_unstemmed%5E600+title_full%5E400+title%5E500+title_alt%5E200+title_new%5E100+series%5E50+series2%5E30+author%5E300+contents%5E10+topic_unstemmed%5E550+topic%5E500+geographic%5E300+genre%5E300+allfields_unstemmed%5E10+fulltext_unstemmed%5E10+allfields+fulltext+description+isbn+issn+long_lat_display&qt=edismax&mm=0%25&hl.fl=title_short%2Ctitle_full_unstemmed%2Ctitle_full%2Ctitle%2Ctitle_alt%2Ctitle_new%2Cseries%2Cseries2%2Cauthor%2Ccontents%2Ctopic_unstemmed%2Ctopic%2Cgeographic%2Cgenre%2Callfields_unstemmed%2Cfulltext_unstemmed%2Callfields%2Cfulltext%2Cdescription%2Cisbn%2Cissn%2Clong_lat_display&q=%D0%BF%D0%BB%D0%B0%C2%AD%D0%B7%C2%AD%D0%BC%D0%BE%C2%AD%D1%85%D0%B8%C2%AD%D0%BC%D0%B8%C2%AD%D1%87%D0%B5%D1%81%D0%BA%D0%BE%D0%B5+%D1%82%D1%80%D0%B0%D0%B2%D0%BB%D0%B5%D0%BD%D0%B8%D0%B5+%D0%BF%D0%BE%D0%BB%D1%83%D0%BF%D1%80%D0%BE%D0%B2%D0%BE%D0%B4%D0%BD%D0%B8%D0%BA%D0%BE%D0%B2%D1%8B%D1%85+%D0%BC%D0%B0%D1%82%D0%B5%D1%80%D0%B8%D0%B0%D0%BB%D0%BE%D0%B2%2A

2026-02-07T11:28:22+00:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&spellcheck=true&spellcheck.dictionary=basicSpell&wt=json&json.nl=arrarr&rows=0&start=0&spellcheck.q=%D0%BF%D0%BB%D0%B0%C2%AD%D0%B7%C2%AD%D0%BC%D0%BE%C2%AD%D1%85%D0%B8%C2%AD%D0%BC%D0%B8%C2%AD%D1%87%D0%B5%D1%81%D0%BA%D0%BE%D0%B5+%D1%82%D1%80%D0%B0%D0%B2%D0%BB%D0%B5%D0%BD%D0%B8%D0%B5+%D0%BF%D0%BE%D0%BB%D1%83%D0%BF%D1%80%D0%BE%D0%B2%D0%BE%D0%B4%D0%BD%D0%B8%D0%BA%D0%BE%D0%B2%D1%8B%D1%85+%D0%BC%D0%B0%D1%82%D0%B5%D1%80%D0%B8%D0%B0%D0%BB%D0%BE%D0%B2%2A&qf=title_short%5E750+title_full_unstemmed%5E600+title_full%5E400+title%5E500+title_alt%5E200+title_new%5E100+series%5E50+series2%5E30+author%5E300+contents%5E10+topic_unstemmed%5E550+topic%5E500+geographic%5E300+genre%5E300+allfields_unstemmed%5E10+fulltext_unstemmed%5E10+allfields+fulltext+description+isbn+issn+long_lat_display&qt=edismax&mm=0%25&hl.fl=title_short%2Ctitle_full_unstemmed%2Ctitle_full%2Ctitle%2Ctitle_alt%2Ctitle_new%2Cseries%2Cseries2%2Cauthor%2Ccontents%2Ctopic_unstemmed%2Ctopic%2Cgeographic%2Cgenre%2Callfields_unstemmed%2Cfulltext_unstemmed%2Callfields%2Cfulltext%2Cdescription%2Cisbn%2Cissn%2Clong_lat_display&q=%D0%BF%D0%BB%D0%B0%C2%AD%D0%B7%C2%AD%D0%BC%D0%BE%C2%AD%D1%85%D0%B8%C2%AD%D0%BC%D0%B8%C2%AD%D1%87%D0%B5%D1%81%D0%BA%D0%BE%D0%B5+%D1%82%D1%80%D0%B0%D0%B2%D0%BB%D0%B5%D0%BD%D0%B8%D0%B5+%D0%BF%D0%BE%D0%BB%D1%83%D0%BF%D1%80%D0%BE%D0%B2%D0%BE%D0%B4%D0%BD%D0%B8%D0%BA%D0%BE%D0%B2%D1%8B%D1%85+%D0%BC%D0%B0%D1%82%D0%B5%D1%80%D0%B8%D0%B0%D0%BB%D0%BE%D0%B2%2A

2026-02-07T11:28:22+00:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&spellcheck=true&spellcheck.dictionary=basicSpell&wt=json&json.nl=arrarr&rows=0&start=0&spellcheck.q=%D0%BF%D0%BB%D0%B0%C2%AD%D0%B7%C2%AD%D0%BC%D0%BE%C2%AD%D1%85%D0%B8%C2%AD%D0%BC%D0%B8%C2%AD%D1%87%D0%B5%D1%81%D0%BA%D0%BE%D0%B5+%D1%82%D1%80%D0%B0%D0%B2%D0%BB%D0%B5%D0%BD%D0%B8%D0%B5+%D0%BF%D0%BE%D0%BB%D1%83%D0%BF%D1%80%D0%BE%D0%B2%D0%BE%D0%B4%D0%BD%D0%B8%D0%BA%D0%BE%D0%B2%D1%8B%D1%85+%D0%BC%D0%B0%D1%82%D0%B5%D1%80%D0%B8%D0%B0%D0%BB%D0%BE%D0%B2%2A&qf=title_short%5E750+title_full_unstemmed%5E600+title_full%5E400+title%5E500+title_alt%5E200+title_new%5E100+series%5E50+series2%5E30+author%5E300+contents%5E10+topic_unstemmed%5E550+topic%5E500+geographic%5E300+genre%5E300+allfields_unstemmed%5E10+fulltext_unstemmed%5E10+allfields+fulltext+description+isbn+issn+long_lat_display&qt=edismax&mm=0%25&hl.fl=title_short%2Ctitle_full_unstemmed%2Ctitle_full%2Ctitle%2Ctitle_alt%2Ctitle_new%2Cseries%2Cseries2%2Cauthor%2Ccontents%2Ctopic_unstemmed%2Ctopic%2Cgeographic%2Cgenre%2Callfields_unstemmed%2Cfulltext_unstemmed%2Callfields%2Cfulltext%2Cdescription%2Cisbn%2Cissn%2Clong_lat_display&q=%D0%BF%D0%BB%D0%B0%C2%AD%D0%B7%C2%AD%D0%BC%D0%BE%C2%AD%D1%85%D0%B8%C2%AD%D0%BC%D0%B8%C2%AD%D1%87%D0%B5%D1%81%D0%BA%D0%BE%D0%B5+%D1%82%D1%80%D0%B0%D0%B2%D0%BB%D0%B5%D0%BD%D0%B8%D0%B5+%D0%BF%D0%BE%D0%BB%D1%83%D0%BF%D1%80%D0%BE%D0%B2%D0%BE%D0%B4%D0%BD%D0%B8%D0%BA%D0%BE%D0%B2%D1%8B%D1%85+%D0%BC%D0%B0%D1%82%D0%B5%D1%80%D0%B8%D0%B0%D0%BB%D0%BE%D0%B2%2A

Ваш пошук - плазмохимическое травление полупроводниковых материалов* - відповідні ресурси не знайдені.

Ви можете отримати більше результатів шляхом корегування Вашого пошукового запиту.

Пошук за не точною відповідністю допоможе знайти терміни зі схожим написанням: плазмохимическое травление полупроводниковых материалов~.

Результати пошуку - пла­з­мо­хи­ми­ческое травление полупроводниковых материалов*

Результати відсутні!

Ви можете отримати більше результатів шляхом корегування Вашого пошукового запиту.

Результати пошуку - плазмохимическое травление полупроводниковых материалов*