Showing
1 - 1
results of
1
for search '
"ВЧ емкостный разряд"
'
Skip to content
VuFind
Your Account
Log Out
Login
Language
English
Deutsch
Українська
All Fields
Title
Journal Title
Author
Subject
Description
Tag
Full text
Find
Advanced
Search Results - "ВЧ емкостный разряд"
Suggested Topics within your search.
Suggested Topics within your search.
HF capacitive discharge
1
plasma-chemical etching of semiconductor materials
1
plasma-chemical reactor
1
ВЧ емкостный разряд
1
плазмохимический реактор
1
плазмохимическое травление полупроводниковых материалов
1
Showing
1 - 1
results of
1
for search '
"ВЧ емкостный разряд"
'
, query time: 0.01s
Refine Results
Sort
Relevance
Date Descending
Date Ascending
Call Number
Author
Title
Select Page | with selected:
Email
Export
Print
Save
Select result number 1
1
Режим работы двухкаскадного термоэлектрического охлаждающего устройства, обеспечивающий минимальную интенсивность отказов...
by
Dudin, S. V.
,
Lisovskiy, V. А.
,
Dahov, A. N.
,
Pletniov, V. M.
Published 2011
Get full text
Article
Save to List
Saved in:
Select Page | with selected:
Email
Export
Print
Save
Search Tools:
RSS Feed
–
Email Search
–
Save Search
Back
Refine Results
Institution
Technology and design in electronic equipment
1
Format
Article
1
Author
Dahov, A. N.
1
Dudin, S. V.
1
Lisovskiy, V. А
1
Pletniov, V. M.
1
Language
Ukrainian
1
Year of Publication
From:
To: