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    Методы и механизмы геттерирования кремниевых структур в производстве интегральных микросхем by Pilipenko, V. A., Gorushko, V. A., Petlitskiy, A. N., Ponaryadov, V. V., Turtsevich, A. S., Shvedov, S. V.

    Published 2013
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