Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system

за авторством A. S. Turtsevich, O. Y. Nalivaiko
Опубліковано 2015

Methods and mechanisms of gettering of silicon structures in the production of integrated circuits

за авторством V. A. Pilipenko, V. A. Gorushko, A. N. Petlitskij, V. V. Ponarjadov, A. S. Turtsevich, S. V. Shvedov
Опубліковано 2013

Dependence of the Structural Properties of Ferroelectric SrBi2Ta2O9 Films on the Temperature of Synthesis

за авторством V. V. Sidskij, A. G. Rybakov, A. V. Semchenko, Ju. Osipova, V. V. Kolos, A. S. Turtsevich, A. N. Asadchij
Опубліковано 2014

Formation of ickel-platinum silicide layer as a barrier Schottky diodes

за авторством P. V. Kuchinskij, F. F. Komarov, O. V. Milchanin, T. B. Kovaleva, V. A. Solodukha, A. S. Turtsevich, Ja. A. Solovev, S. V. Gaponenko
Опубліковано 2014