Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system за авторством A. S. Turtsevich, O. Y. Nalivaiko

Отримати повний текст

Methods and mechanisms of gettering of silicon structures in the production of integrated circuits за авторством V. A. Pilipenko, V. A. Gorushko, A. N. Petlitskij, V. V. Ponarjadov, A. S. Turtsevich, S. V. Shvedov

Отримати повний текст

Dependence of the Structural Properties of Ferroelectric SrBi2Ta2O9 Films on the Temperature of Synthesis за авторством V. V. Sidskij, A. G. Rybakov, A. V. Semchenko, Ju. Osipova, V. V. Kolos, A. S. Turtsevich, A. N. Asadchij

Отримати повний текст

Formation of ickel-platinum silicide layer as a barrier Schottky diodes за авторством P. V. Kuchinskij, F. F. Komarov, O. V. Milchanin, T. B. Kovaleva, V. A. Solodukha, A. S. Turtsevich, Ja. A. Solovev, S. V. Gaponenko

Отримати повний текст