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13Optimization of the collecting mirror location in the plasma source of extreme ultraviolet radiationby Borgun, Ie.V., Hrechko, Ya.O., Azarenkov, N.A., Dimitrova, V.D., Ryabchikov, D.L., Sereda, I.N., Hryhorenko, A.V., Tseluyko, A.F.Get full text
Published in Вопросы атомной науки и техники (2015)
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14by Mysiura, I.N., Girka, I.A., Azarenkov, N.A., Borgun, Ie.V., Hrechko, Ya.O., Hryhorenko, A.V., Dimitrova, V.D., Ryabchikov, D.L., Sereda, I.N., Tseluyko, A.F.Get full text
Published in Вопросы атомной науки и техники (2014)
Article