Optimization of the collecting mirror location in the plasma source of extreme ultraviolet radiation von Borgun, Ie.V., Hrechko, Ya.O., Azarenkov, N.A., Dimitrova, V.D., Ryabchikov, D.L., Sereda, I.N., Hryhorenko, A.V., Tseluyko, A.F.

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Dynamics of EUV-radiation from the partially contracted plasma diode von Hrechko, Ya.O., Azarenkov, N.A., Dimitrova, V.D., Borgun, Ie.V., Ryabchikov, D.L., Sereda, I.N., Hryhorenko, A.V., Tseluyko, A.F.

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Features of electron beam evaporation under surface electron beam formation von Mysiura, I.N., Girka, I.A., Azarenkov, N.A., Borgun, Ie.V., Hrechko, Ya.O., Hryhorenko, A.V., Dimitrova, V.D., Ryabchikov, D.L., Sereda, I.N., Tseluyko, A.F.

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