Open Science Harvester of NAS of Ukraine

Investigation of the effect of technological parameters on efficiency of chemical string cutting of semiconductor materials

by Kravetsky, M.Yu., Sypko, S.A., Fomin, A.V.
Published in Semiconductor Physics Quantum Electronics & Optoelectronics (2002)

Modeling the process of removal aimed at cut traces on semiconductor wafers by using the method of contactless chemical-and-dynamical polishing

by Pashchenko, G.A., Kravetskyi, M.Yu., Fomin, A.V.
Published in Semiconductor Physics Quantum Electronics & Optoelectronics (2015)

Balance model for contactless chemo-mechanical polishing of wafers

by Grigoriev, N.N., Kravetsky, M.Yu., Paschenko, G.A., Sypko, S.A., Fomin, A.V.
Published in Semiconductor Physics Quantum Electronics & Optoelectronics (2002)