Surface roughness of optoelectronic components in mechanical polishing by Ju. D. Filatov

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Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components by Ju. D. Filatov

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Diamond polishing of crystalline materials for optoelectronics by Ju. D. Filatov

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Formation of flat surfaces of optoelectronic components in diamond polishing by Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, A. G. Vetrov

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In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing by Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. Filatov, G. Montej

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Education of sludge particles and wear particles polishing powder in the polishing process nitride aluminum by Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin

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Efficiency of polishing of anisotropic single-crystal materials for optoelectronics by Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov

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Polished surface roughness of optoelectronic components made of monocrystalline materials by Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov

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A mechanism of diamond-abrasive finishing of monocrystalline silicon carbide by Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev

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Precision shaping flat surfaces details of optics and microelectronics when polishing by Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin, A. G. Vetrov

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Polishing of opto-electronic equipment elements from single-crystal silicon carbide by Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev, V. D. Kurilovich, M. A. Danilchenko, T. A. Prikhna, A. I. Borimskij, A. M. Kutsaj, V. G. Poltoratskij

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Studies of the oxidation stability, mechanical characteristics of materials based on MAX Phases of the Ti–AL–(C, N) systems, and of the possibility of their use as tool bonds and m... by T. A. Prikhna, A. V. Starostina, D. Litskendorf, I. A. Petrusha, S. A. Ivakhnenko, A. I. Borimskij, Ju. D. Filatov, M. G. Loshak, M. A. Serga, V. N. Tkach, V. Z. Turkevich, V. B. Sverdun, S. A. Klimenko, D. V. Turkevich, C. N. Dub, T. V. Basjuk, M. V. Karpets, V. E. Moshchil, A. V. Kozyrev, V. V. Kovyljaev, G. D. Ilnitskaja, T. Kabjosh, P. Sharte

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