Surface roughness of optoelectronic components in mechanical polishing von Ju. D. Filatov

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Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components von Ju. D. Filatov

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Diamond polishing of crystalline materials for optoelectronics von Ju. D. Filatov

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Formation of flat surfaces of optoelectronic components in diamond polishing von Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, A. G. Vetrov

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In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing von Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. Filatov, G. Montej

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Education of sludge particles and wear particles polishing powder in the polishing process nitride aluminum von Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin

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Efficiency of polishing of anisotropic single-crystal materials for optoelectronics von Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov

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Polished surface roughness of optoelectronic components made of monocrystalline materials von Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov

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A mechanism of diamond-abrasive finishing of monocrystalline silicon carbide von Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev

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Precision shaping flat surfaces details of optics and microelectronics when polishing von Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin, A. G. Vetrov

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Polishing of opto-electronic equipment elements from single-crystal silicon carbide von Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev, V. D. Kurilovich, M. A. Danilchenko, T. A. Prikhna, A. I. Borimskij, A. M. Kutsaj, V. G. Poltoratskij

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Studies of the oxidation stability, mechanical characteristics of materials based on MAX Phases of the Ti–AL–(C, N) systems, and of the possibility of their use as tool bonds and m... von T. A. Prikhna, A. V. Starostina, D. Litskendorf, I. A. Petrusha, S. A. Ivakhnenko, A. I. Borimskij, Ju. D. Filatov, M. G. Loshak, M. A. Serga, V. N. Tkach, V. Z. Turkevich, V. B. Sverdun, S. A. Klimenko, D. V. Turkevich, C. N. Dub, T. V. Basjuk, M. V. Karpets, V. E. Moshchil, A. V. Kozyrev, V. V. Kovyljaev, G. D. Ilnitskaja, T. Kabjosh, P. Sharte

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