Surface roughness of optoelectronic components in mechanical polishing за авторством Ju. D. Filatov

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Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components за авторством Ju. D. Filatov

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Diamond polishing of crystalline materials for optoelectronics за авторством Ju. D. Filatov

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Formation of flat surfaces of optoelectronic components in diamond polishing за авторством Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, A. G. Vetrov

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In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing за авторством Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. Filatov, G. Montej

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Education of sludge particles and wear particles polishing powder in the polishing process nitride aluminum за авторством Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin

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Efficiency of polishing of anisotropic single-crystal materials for optoelectronics за авторством Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov

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Polished surface roughness of optoelectronic components made of monocrystalline materials за авторством Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov

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A mechanism of diamond-abrasive finishing of monocrystalline silicon carbide за авторством Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev

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Precision shaping flat surfaces details of optics and microelectronics when polishing за авторством Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja. Jurchishin, A. G. Vetrov

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Polishing of opto-electronic equipment elements from single-crystal silicon carbide за авторством Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev, V. D. Kurilovich, M. A. Danilchenko, T. A. Prikhna, A. I. Borimskij, A. M. Kutsaj, V. G. Poltoratskij

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Studies of the oxidation stability, mechanical characteristics of materials based on MAX Phases of the Ti–AL–(C, N) systems, and of the possibility of their use as tool bonds and m... за авторством T. A. Prikhna, A. V. Starostina, D. Litskendorf, I. A. Petrusha, S. A. Ivakhnenko, A. I. Borimskij, Ju. D. Filatov, M. G. Loshak, M. A. Serga, V. N. Tkach, V. Z. Turkevich, V. B. Sverdun, S. A. Klimenko, D. V. Turkevich, C. N. Dub, T. V. Basjuk, M. V. Karpets, V. E. Moshchil, A. V. Kozyrev, V. V. Kovyljaev, G. D. Ilnitskaja, T. Kabjosh, P. Sharte

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