In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing von Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. Filatov, G. Montej

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Efficiency of polishing of anisotropic single-crystal materials for optoelectronics von Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov

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Polished surface roughness of optoelectronic components made of monocrystalline materials von Ju. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. D. Filatov, A. G. Vetrov

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A mechanism of diamond-abrasive finishing of monocrystalline silicon carbide von Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev

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Polishing of opto-electronic equipment elements from single-crystal silicon carbide von Ju. D. Filatov, A. G. Vetrov, V. I. Sidorko, Ju. Filatov, S. V. Kovalev, V. D. Kurilovich, M. A. Danilchenko, T. A. Prikhna, A. I. Borimskij, A. M. Kutsaj, V. G. Poltoratskij

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