Peculiarities of electromagnetic filter operation in penning source with metal hydride cathode von Sereda, I., Hrechko, Ya., Babenko, Ie., Kashaba, A.

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Solid ion accelerator based on magnetron sputtering discharge von Azarenkov, N.A., Bizyukov, I.A., Kashaba, A.Y., Sereda, K.N.

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Study of mechanism of anode layer instability of the discharge in transverse magnetic field von Abolmasov, S.N., Bizyukov, A.A., Kashaba, A.Y., Sereda, K.N.

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Improvement of penning ion sources von Bizyukov, A.A., Bobkov, Vl.V., Kashaba, A.Y., Sereda, K.N.

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TiN coating etching from a surface of the instrument in beam-plasma system von Bizyukov, A.A., Kashaba, A.Y., Sereda, K.N., Sleptsov, V.V., Danziger, М., Phiodorov, S.

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Phase states of macroparticles under interaction of keV ion beam with dusty plasma von Bizyukov, A.A., Girka, O.I., Kashaba, A.Ye., Romashchenko, E.V., Sereda, K.N., Chibisov, A.D.

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Features of high-current pulsed regimes in regimes in magnetron sputtering systems von Bizyukov, A.A., Kashaba, A.Ye., Romashchenko, E.V., Sereda, K.N., Tarasov, I.K., Abolmasov, S.N.

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Large-area surface wave plasma source von Azarenkov, N.A., Bizyukov, A.A., Sereda, K.N., Tseluyko, A.Ph., Yunakov, N.N., Gapon, A.V., Kashaba, A.Y.

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Surface wave plasma source for broad-beam ion and electron production von Azarenkov, N.A., Bizyukov, A.A., Gapon, A.V., Olefir, V.P., Kashaba, A.Y., Sereda, K.N., Tarasov, I.K.

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Solid ion source based on hollow-cylindrical magnetron sputtering discharge von Azarenkov, N.A., Bizyukov, A.A., Bizyukov, I.A., Bobkov, V.V., Kashaba, A.E., Krieger, K., Sereda, K.N., Tarasov, I.K.

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