Plasma potential influence on ion energy Distribution function in ICP source von Vozniy, O.V., Yeom, G.Y., Kropotov, A.Yu.

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Magnetron sputtering of high temperature composite ceramics AlN-TiB₂-TiSi₂ von Torianik, I.N., Beresnev, V.M., Pogrebnjak, A.D., Sobol, O.V., Beresneva, Ye.V., Podcherniaieva, I.A., Kropotov, A.Yu., Stiervoiedov, N.G., Turbin, P.V., Kolesnikov, D.A., Grankin, S.S., Nyemchenko, U.S., Srebniuk, P.A., Novikov, V.Yu.

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