Formation of Nanostructured Relief of TiN—Fe Heterostructures in Hybrid Helicon-Arc Plasma Reactor

за авторством Rudenko, E.M., Korotash, I.V., Polotskiy, D.Y., Osipov, L.S., Dyakin, M.V., Prikhna, T.A., Shapovalov, A.P.
Опубліковано 2015

Сontrolling parameters determining technological properties of a helicon discharge system

за авторством Semenyuk, V.F., Virko, V.F., Korotash, I.V., Osipov, L.S., Polotsky, D.Yu., Rudenko, E.M., Slobodyan, V.M., Shamrai, K.P.
Опубліковано 2013

Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique

за авторством Shapovalov, A.P., Korotash, I.V., Rudenko, E.M., Sizov, F.F., Dubyna, D.S., Osipov, L.S., Polotskiy, D.Yu., Tsybri, Z.F., Korchovyi, A.A.
Опубліковано 2015

Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique

за авторством Shapovalov, A.P., Korotash, I.V., Rudenko, E.M., Sizov, F.F., Dubyna, D.S., Osipov, L.S., Polotskiy, D.Yu., Tsybrii, Z.F., Korchovyi, A.A.
Опубліковано 2015