Formation of Nanostructured Relief of TiN—Fe Heterostructures in Hybrid Helicon-Arc Plasma Reactor by Rudenko, E.M., Korotash, I.V., Polotskiy, D.Y., Osipov, L.S., Dyakin, M.V., Prikhna, T.A., Shapovalov, A.P.

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Сontrolling parameters determining technological properties of a helicon discharge system by Semenyuk, V.F., Virko, V.F., Korotash, I.V., Osipov, L.S., Polotsky, D.Yu., Rudenko, E.M., Slobodyan, V.M., Shamrai, K.P.

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Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique by Shapovalov, A.P., Korotash, I.V., Rudenko, E.M., Sizov, F.F., Dubyna, D.S., Osipov, L.S., Polotskiy, D.Yu., Tsybrii, Z.F., Korchovyi, A.A.

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