Charging processes of metal macroparticles in the low-temperature plasma at presence of high-energy electron beam von Bizyukov, A.A., Sereda, K.N., Chibisov, A.D.

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Particle charging in beam-plasma systems von Bizyukov, А.А., Romashchenko, E.V., Sereda, K.N., Abolmasov, S.N.

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Solid ion accelerator based on magnetron sputtering discharge von Azarenkov, N.A., Bizyukov, I.A., Kashaba, A.Y., Sereda, K.N.

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Study of mechanism of anode layer instability of the discharge in transverse magnetic field von Abolmasov, S.N., Bizyukov, A.A., Kashaba, A.Y., Sereda, K.N.

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Increasing of mass transfer efficiency at magnetron deposition of metal coating von Chunadra, A.G., Sereda, K.N., Tarasov, I.K., Bizyukov, A.A.

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Improvement of penning ion sources von Bizyukov, A.A., Bobkov, Vl.V., Kashaba, A.Y., Sereda, K.N.

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Mass-separation of impurities in the ion beam systems with reversed magnetic beam focusing von Girka, O.I., Bizyukov, I.A., Bizyukov, A.A., Sereda, K.N., Herashchenko, S.S.

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Сharging processes and phase states of macroparticles in low-pressure arc discharge von Bizyukov, А.А., Chibisov, А.D., Sereda, K.N., Romashchenko, E.V., Dimitrova, V.

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High-current pulsed operation modes of the planar MSS with magnetically insulated anode without transition to the arc discharge von Bizyukov, A.A., Sereda, K.N., Sleptsov, V.V., Tarasov, I.K., Chunadra, A.G.

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Hall ion source with ballistic and magnetic beam focusing von Bizyukov, A.A., Girka, A.I., Sereda, K.N., Nazarov, A.V., Romaschenko, E.V.

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Emission characteristics and potential of macroparticle in beam-plasma discharge von Bizyukov, A.A., Romaschenko, E.V., Sereda, K.N., Chibisov, A.D., Nazarov, A.V.

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Control of planar magnetron sputtering system operating modes by additional anode magnetic field von Bizyukov, A.A., Girka, O.I., Sereda, K.N., Sleptsov, V.V., Chunadra, A.G.

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TiN coating etching from a surface of the instrument in beam-plasma system von Bizyukov, A.A., Kashaba, A.Y., Sereda, K.N., Sleptsov, V.V., Danziger, М., Phiodorov, S.

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Capture and transport of macroparticles in curved plasma duct at low magnetic field in the presence of an electron beam von Bizyukov, A.A., Sereda, K.N., Chibisov, A.D., Romashchenko, E.V., Kovalenko, V.V.

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Phase states of macroparticles under interaction of keV ion beam with dusty plasma von Bizyukov, A.A., Girka, O.I., Kashaba, A.Ye., Romashchenko, E.V., Sereda, K.N., Chibisov, A.D.

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Features of high-current pulsed regimes in regimes in magnetron sputtering systems von Bizyukov, A.A., Kashaba, A.Ye., Romashchenko, E.V., Sereda, K.N., Tarasov, I.K., Abolmasov, S.N.

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Ion beam system for nanotrimming of functional microelectronics layers von Bizyukov, A.A., Bizyukov, I.A., Girka, O.I., Sereda, K.N., Sleptsov, V.V., Gutkin, M., Mishin, S.

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Large-area surface wave plasma source von Azarenkov, N.A., Bizyukov, A.A., Sereda, K.N., Tseluyko, A.Ph., Yunakov, N.N., Gapon, A.V., Kashaba, A.Y.

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Surface wave plasma source for broad-beam ion and electron production von Azarenkov, N.A., Bizyukov, A.A., Gapon, A.V., Olefir, V.P., Kashaba, A.Y., Sereda, K.N., Tarasov, I.K.

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Solid ion source based on hollow-cylindrical magnetron sputtering discharge von Azarenkov, N.A., Bizyukov, A.A., Bizyukov, I.A., Bobkov, V.V., Kashaba, A.E., Krieger, K., Sereda, K.N., Tarasov, I.K.

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