Charging processes of metal macroparticles in the low-temperature plasma at presence of high-energy electron beam by Bizyukov, A.A., Sereda, K.N., Chibisov, A.D.

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Particle charging in beam-plasma systems by Bizyukov, А.А., Romashchenko, E.V., Sereda, K.N., Abolmasov, S.N.

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Solid ion accelerator based on magnetron sputtering discharge by Azarenkov, N.A., Bizyukov, I.A., Kashaba, A.Y., Sereda, K.N.

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Study of mechanism of anode layer instability of the discharge in transverse magnetic field by Abolmasov, S.N., Bizyukov, A.A., Kashaba, A.Y., Sereda, K.N.

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Increasing of mass transfer efficiency at magnetron deposition of metal coating by Chunadra, A.G., Sereda, K.N., Tarasov, I.K., Bizyukov, A.A.

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Improvement of penning ion sources by Bizyukov, A.A., Bobkov, Vl.V., Kashaba, A.Y., Sereda, K.N.

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Mass-separation of impurities in the ion beam systems with reversed magnetic beam focusing by Girka, O.I., Bizyukov, I.A., Bizyukov, A.A., Sereda, K.N., Herashchenko, S.S.

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Сharging processes and phase states of macroparticles in low-pressure arc discharge by Bizyukov, А.А., Chibisov, А.D., Sereda, K.N., Romashchenko, E.V., Dimitrova, V.

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High-current pulsed operation modes of the planar MSS with magnetically insulated anode without transition to the arc discharge by Bizyukov, A.A., Sereda, K.N., Sleptsov, V.V., Tarasov, I.K., Chunadra, A.G.

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Hall ion source with ballistic and magnetic beam focusing by Bizyukov, A.A., Girka, A.I., Sereda, K.N., Nazarov, A.V., Romaschenko, E.V.

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Emission characteristics and potential of macroparticle in beam-plasma discharge by Bizyukov, A.A., Romaschenko, E.V., Sereda, K.N., Chibisov, A.D., Nazarov, A.V.

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Control of planar magnetron sputtering system operating modes by additional anode magnetic field by Bizyukov, A.A., Girka, O.I., Sereda, K.N., Sleptsov, V.V., Chunadra, A.G.

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TiN coating etching from a surface of the instrument in beam-plasma system by Bizyukov, A.A., Kashaba, A.Y., Sereda, K.N., Sleptsov, V.V., Danziger, М., Phiodorov, S.

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Capture and transport of macroparticles in curved plasma duct at low magnetic field in the presence of an electron beam by Bizyukov, A.A., Sereda, K.N., Chibisov, A.D., Romashchenko, E.V., Kovalenko, V.V.

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Phase states of macroparticles under interaction of keV ion beam with dusty plasma by Bizyukov, A.A., Girka, O.I., Kashaba, A.Ye., Romashchenko, E.V., Sereda, K.N., Chibisov, A.D.

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Features of high-current pulsed regimes in regimes in magnetron sputtering systems by Bizyukov, A.A., Kashaba, A.Ye., Romashchenko, E.V., Sereda, K.N., Tarasov, I.K., Abolmasov, S.N.

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Ion beam system for nanotrimming of functional microelectronics layers by Bizyukov, A.A., Bizyukov, I.A., Girka, O.I., Sereda, K.N., Sleptsov, V.V., Gutkin, M., Mishin, S.

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Large-area surface wave plasma source by Azarenkov, N.A., Bizyukov, A.A., Sereda, K.N., Tseluyko, A.Ph., Yunakov, N.N., Gapon, A.V., Kashaba, A.Y.

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Surface wave plasma source for broad-beam ion and electron production by Azarenkov, N.A., Bizyukov, A.A., Gapon, A.V., Olefir, V.P., Kashaba, A.Y., Sereda, K.N., Tarasov, I.K.

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Solid ion source based on hollow-cylindrical magnetron sputtering discharge by Azarenkov, N.A., Bizyukov, A.A., Bizyukov, I.A., Bobkov, V.V., Kashaba, A.E., Krieger, K., Sereda, K.N., Tarasov, I.K.

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